Preparation and characterization of n-type conductive (Al, Co) co-doped ZnO thin films deposited by sputtering from aerogel nanopowders
Identifieur interne : 000826 ( Main/Exploration ); précédent : 000825; suivant : 000827Preparation and characterization of n-type conductive (Al, Co) co-doped ZnO thin films deposited by sputtering from aerogel nanopowders
Auteurs : L. El Mir [Tunisie] ; Z. Ben Ayadi [Tunisie] ; M. Saadoun [Tunisie] ; K. Djessas [France] ; H. J. Von Bardeleben [France] ; S. Alaya [Tunisie]Source :
- Applied surface science [ 0169-4332 ] ; 2007.
Descripteurs français
- Pascal (Inist)
- Préparation, Semiconducteur type n, Matériau dopé, Couche mince, Pulvérisation irradiation, Croissance film, Pulvérisation cathodique, Magnétron, Nanocristal, Nanoparticule, Procédé sol gel, Facteur transmission, Conductivité électrique, Oxyde de zinc, Aérogel, Nanostructure, Microscopie électronique transmission, Codopage, Addition aluminium, Addition cobalt, Microscopie électronique balayage, O Zn, ZnO:Al Co, 8115C, 6855J, 7361, 7820C.
English descriptors
- KwdEn :
- Aerogels, Aluminium additions, Cathode sputtering, Cobalt additions, Codoping, Doped materials, Electrical conductivity, Film growth, Magnetrons, Nanocrystal, Nanoparticles, Nanostructures, Preparation, Scanning electron microscopy, Sol-gel process, Sputtering, Thin films, Transmission electron microscopy, Transmittance, Zinc oxide, n type semiconductor.
Abstract
Highly transparent, n-type conducting ZnO thin films were obtained by low temperature magnetron sputtering of (Co, Al) co-doped ZnO nanocrystalline aerogels. The nanoparticles of ∼30 nm size were synthesized by a sol-gel method using supercritical drying in ethyl alcohol. The structural, optical and electrical properties of the films were investigated. The ZnO films were polycrystalline textured, preferentially oriented with the (0 0 2) crystallographic direction normal to the film plane. The films show within the visible wavelength region an optical transmittance of more than 90% and a low electrical resistivity of 3.5 x 10-4 Ω cm at room temperature.
Affiliations:
- France, Tunisie
- Languedoc-Roussillon, Occitanie (région administrative), Île-de-France
- Paris, Perpignan
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Le document en format XML
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El Mir</name><affiliation wicri:level="1"><inist:fA14 i1="01"><s1>Laboratoire de physique des matériaux et des nanomatériaux appliquée à l'environnement, faculté des sciences de Gabès, Cité Erriadh Manara Zrig</s1><s2>6072 Gabès</s2><s3>TUN</s3><sZ>1 aut.</sZ><sZ>2 aut.</sZ><sZ>3 aut.</sZ><sZ>6 aut.</sZ></inist:fA14><country>Tunisie</country><wicri:noRegion>6072 Gabès</wicri:noRegion></affiliation></author><author><name sortKey="Ben Ayadi, Z" sort="Ben Ayadi, Z" uniqKey="Ben Ayadi Z" first="Z." last="Ben Ayadi">Z. Ben Ayadi</name><affiliation wicri:level="1"><inist:fA14 i1="01"><s1>Laboratoire de physique des matériaux et des nanomatériaux appliquée à l'environnement, faculté des sciences de Gabès, Cité Erriadh Manara Zrig</s1><s2>6072 Gabès</s2><s3>TUN</s3><sZ>1 aut.</sZ><sZ>2 aut.</sZ><sZ>3 aut.</sZ><sZ>6 aut.</sZ></inist:fA14><country>Tunisie</country><wicri:noRegion>6072 Gabès</wicri:noRegion></affiliation></author><author><name sortKey="Saadoun, M" sort="Saadoun, M" uniqKey="Saadoun M" first="M." last="Saadoun">M. Saadoun</name><affiliation wicri:level="1"><inist:fA14 i1="01"><s1>Laboratoire de physique des matériaux et des nanomatériaux appliquée à l'environnement, faculté des sciences de Gabès, Cité Erriadh Manara Zrig</s1><s2>6072 Gabès</s2><s3>TUN</s3><sZ>1 aut.</sZ><sZ>2 aut.</sZ><sZ>3 aut.</sZ><sZ>6 aut.</sZ></inist:fA14><country>Tunisie</country><wicri:noRegion>6072 Gabès</wicri:noRegion></affiliation></author><author><name sortKey="Djessas, K" sort="Djessas, K" uniqKey="Djessas K" first="K." last="Djessas">K. Djessas</name><affiliation wicri:level="3"><inist:fA14 i1="02"><s1>Laboratoire de mathématiques et physique des systèmes (MEPS), université de Perpignan, 52, avenue Paul Alduy</s1><s2>66860 Perpignan</s2><s3>FRA</s3><sZ>4 aut.</sZ></inist:fA14><country>France</country><placeName><region type="region" nuts="2">Occitanie (région administrative)</region><region type="old region" nuts="2">Languedoc-Roussillon</region><settlement type="city">Perpignan</settlement></placeName></affiliation></author><author><name sortKey="Von Bardeleben, H J" sort="Von Bardeleben, H J" uniqKey="Von Bardeleben H" first="H. J." last="Von Bardeleben">H. J. Von Bardeleben</name><affiliation wicri:level="3"><inist:fA14 i1="03"><s1>Institut des nanosciences de Paris (INSP) UMR CNRS 7588, universités Pierre-et-Marie-Curie (Paris 6) et Denis-Diderot (Paris 7), campus Boucicaut, 140, rue de Lourmel</s1><s2>75015 Paris</s2><s3>FRA</s3><sZ>5 aut.</sZ></inist:fA14><country>France</country><placeName><region type="region" nuts="2">Île-de-France</region><settlement type="city">Paris</settlement></placeName></affiliation></author><author><name sortKey="Alaya, S" sort="Alaya, S" uniqKey="Alaya S" first="S." last="Alaya">S. Alaya</name><affiliation wicri:level="1"><inist:fA14 i1="01"><s1>Laboratoire de physique des matériaux et des nanomatériaux appliquée à l'environnement, faculté des sciences de Gabès, Cité Erriadh Manara Zrig</s1><s2>6072 Gabès</s2><s3>TUN</s3><sZ>1 aut.</sZ><sZ>2 aut.</sZ><sZ>3 aut.</sZ><sZ>6 aut.</sZ></inist:fA14><country>Tunisie</country><wicri:noRegion>6072 Gabès</wicri:noRegion></affiliation></author></analytic><series><title level="j" type="main">Applied surface science</title><title level="j" type="abbreviated">Appl. surf. sci.</title><idno type="ISSN">0169-4332</idno><imprint><date when="2007">2007</date></imprint></series></biblStruct></sourceDesc><seriesStmt><title level="j" type="main">Applied surface science</title><title level="j" type="abbreviated">Appl. surf. sci.</title><idno type="ISSN">0169-4332</idno></seriesStmt></fileDesc><profileDesc><textClass><keywords scheme="KwdEn" xml:lang="en"><term>Aerogels</term><term>Aluminium additions</term><term>Cathode sputtering</term><term>Cobalt additions</term><term>Codoping</term><term>Doped materials</term><term>Electrical conductivity</term><term>Film growth</term><term>Magnetrons</term><term>Nanocrystal</term><term>Nanoparticles</term><term>Nanostructures</term><term>Preparation</term><term>Scanning electron microscopy</term><term>Sol-gel process</term><term>Sputtering</term><term>Thin films</term><term>Transmission electron microscopy</term><term>Transmittance</term><term>Zinc oxide</term><term>n type semiconductor</term></keywords><keywords scheme="Pascal" xml:lang="fr"><term>Préparation</term><term>Semiconducteur type n</term><term>Matériau dopé</term><term>Couche mince</term><term>Pulvérisation irradiation</term><term>Croissance film</term><term>Pulvérisation cathodique</term><term>Magnétron</term><term>Nanocristal</term><term>Nanoparticule</term><term>Procédé sol gel</term><term>Facteur transmission</term><term>Conductivité électrique</term><term>Oxyde de zinc</term><term>Aérogel</term><term>Nanostructure</term><term>Microscopie électronique transmission</term><term>Codopage</term><term>Addition aluminium</term><term>Addition cobalt</term><term>Microscopie électronique balayage</term><term>O Zn</term><term>ZnO:Al Co</term><term>8115C</term><term>6855J</term><term>7361</term><term>7820C</term></keywords></textClass></profileDesc></teiHeader><front><div type="abstract" xml:lang="en">Highly transparent, n-type conducting ZnO thin films were obtained by low temperature magnetron sputtering of (Co, Al) co-doped ZnO nanocrystalline aerogels. The nanoparticles of ∼30 nm size were synthesized by a sol-gel method using supercritical drying in ethyl alcohol. The structural, optical and electrical properties of the films were investigated. The ZnO films were polycrystalline textured, preferentially oriented with the (0 0 2) crystallographic direction normal to the film plane. The films show within the visible wavelength region an optical transmittance of more than 90% and a low electrical resistivity of 3.5 x 10<sup>-4</sup> Ω cm at room temperature.</div></front></TEI><affiliations><list><country><li>France</li><li>Tunisie</li></country><region><li>Languedoc-Roussillon</li><li>Occitanie (région administrative)</li><li>Île-de-France</li></region><settlement><li>Paris</li><li>Perpignan</li></settlement></list><tree><country name="Tunisie"><noRegion><name sortKey="El Mir, L" sort="El Mir, L" uniqKey="El Mir L" first="L." last="El Mir">L. El Mir</name></noRegion><name sortKey="Alaya, S" sort="Alaya, S" uniqKey="Alaya S" first="S." last="Alaya">S. Alaya</name><name sortKey="Ben Ayadi, Z" sort="Ben Ayadi, Z" uniqKey="Ben Ayadi Z" first="Z." last="Ben Ayadi">Z. Ben Ayadi</name><name sortKey="Saadoun, M" sort="Saadoun, M" uniqKey="Saadoun M" first="M." last="Saadoun">M. Saadoun</name></country><country name="France"><region name="Occitanie (région administrative)"><name sortKey="Djessas, K" sort="Djessas, K" uniqKey="Djessas K" first="K." last="Djessas">K. Djessas</name></region><name sortKey="Von Bardeleben, H J" sort="Von Bardeleben, H J" uniqKey="Von Bardeleben H" first="H. J." last="Von Bardeleben">H. J. Von Bardeleben</name></country></tree></affiliations></record>Pour manipuler ce document sous Unix (Dilib)
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